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宇宙用MEMSの信頼性に関しては[[JPL:http://www.jpl.nasa.gov/]]の[[PAPERS, PRESENTATIONS, AND REFERENCE MATERIALS:http://parts.jpl.nasa.gov/resources.htm]]にある「MEMS RELIABILITY ASSURANCE GUIDELINES FOR SPACE APPLICATIONS」がバイブル的文章。

打ち上げ時の振動と放射線に耐える必要がある。

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